Temperature probe
Temperature probes are used in many applications for sensing the temperature of a solid, liquid or gas. Different classes of temperature probes are known to measure temperature. One class of temperature sensors employs resistive elements. A resistance thermometer depends upon the variation of the electrical resistance of a wire with temperature. Most metals become more resistant to the passage of an electrical current as they become hotter. As the temperature of the element increases or decreases, the resistance of the element also increases or decreases providing an indication of the temperature change. A voltage signal applied to the element is measured to give a reading of the resistance, and thus the temperature. Contact temperature measurement is a very reliable temperature measurement. Contacting-type surface temperature probes are designed to be brought into contact with a surface in order to measure the temperature of the surface. In order to measure and control temperature accurately, temperature sensors or probes are used that have a high degree of sensitivity and linearity in the required temperature range. The ultimate resolution of the measuring instrument is determined by the measuring chain and the physical characteristics of the sensor. Non contact techniques rely on radiation transfer of heat between an object (e.g. semiconductor wafer) and sensor. There are non-contact optical temperature measurement techniques based on changes in the reflectivity and transmission of semiconductor wafers with temperature. A total temperature probe (TAT) measures the total temperature of the air flow in which it is placed. When the speed of the air flow is high enough, a temperature measurement element placed in the probe takes the temperature of the air thanks to the convection effect.
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