Pressure sensor
Pressure sensors are extensively used in increasingly varied industrial and commercial applications, such as automotive vehicles, hydraulic systems, engine testing, and etc. There're different types of pressure sensors which include gage pressure sensors, vacuum pressure sensors, differential pressure sensors, absolute pressure sensors and barometric pressure sensors. The most commonly used conversion principles for silicon based pressure sensors are capacitive detection and piezoresistive detection. A pressure sensor includes, in general, a pressure measuring cell comprised of a base plate and a measuring membrane, or diaphragm, with a pressure chamber being formed between the measuring membrane and the base plate. Many pressure sensors utilize a flexible diaphragm having a piezoresistor located thereon such that flexure of the diaphragm causes a change in the resistance of the piezoresistor. The piezoresistive pressure sensors may include a silicon diaphragm with conductive or resistive areas on the surface of the diaphragm. A capacitive pressure sensor detects a pressure by detecting an electrostatic capacitance. A capacitive pressure sensor has a substrate on which is provided a diaphragm, which changes its shape in accordance with pressure, and a substrate which an electrode is provided on; these substrates are bonded together so as to face each other with a gap therebetween. Pressure is detected based on change in the capacitance between the diaphragm and the electrode. Piezoresistive sensors are generally considered to be more robust than capacitive sensors. Another advantage is that they give an output signal proportional to the input with good linearity. Capacitive sensors have the advantage over the piezoresistive type in that they consume less power, but have a non-linear direct output signal and are more sensitive to electromagnetic interference.
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