Flow sensor
A flow sensor is a device that responds to fluid flow by providing an output indicative of the fluid flow rate. Flow sensors are utilized in a variety of fluid-sensing applications for detecting the quality of fluids, including gas and liquid. Flow control of fluids is important in many industries. For example, many processes in the manufacture of semiconductors require a precise reaction of two or more gases under controlled conditions. Mass flow meters are used to control molecular level chemical reactions. Mass flow sensors are devices which have a sensor element whose measuring signal is representative of a mass flow in a main duct, for example in an intake connector of an intake section of an internal combustion engine. Mass flow meters typically operate on the principle of directing fluid flow through two parallel passageways or branches. A thermal mass flow sensor is a flow sensor that provides an output that varies with the flow rate of a fluid in a flow path based on heat convection, conduction and/or flux resulting from the flow of the fluid. Thermal based thin film systems are typically used as flow sensors to determine the velocity of gas flowing over the sensor. When fluid flows over the sensor, the flow distorts a set of generated isotherms which can be at least partially detected by a heat sensor. Ultrasonic transit time flow sensors detect the acoustic propagation time difference between the upstream and downstream ultrasonic transmissions resulting from the movement of a flowing fluid, which may be a liquid or a gas, and process this information to derive a fluid flow rate. Air flow sensors are used in numerous industrial and commercial applications to determine mass air flow rates and to protect equipment from overheating. Among these applications are the protection of electronic systems, such as mainframe computers and peripherals, HVAC systems, large power supplies, medical diagnostic and treatment equipment as well as radar systems. A basic air flow sensor consists of two major components, a heating element and a temperature sensor.
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