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Mass flow controller

A mass flow controller (MFC) is a closed loop device that sets, measures, and controls the flow of the mass of a process gas. Thermal mass flow controllers operate on the principle that the rate of heat transfer from the walls of a flow channel to a fluid flowing in laminar flow within the channel is a function of the difference in temperatures of the fluid and the channel walls, the specific heat of the fluid, and the mass flow rate of the fluid. Thus, the rate of mass flow of a fluid can be determined if the properties of the fluid and the temperatures of the fluid and tube are known. Pressure-based mass flow controllers operate on the principle that changes in fluid pressure induce deflections in a deformable electrode, the deflections causing corresponding changes in the electrical capacitance of the deformable electrode and a stationary one coupled therewith. Mass flow controllers (MFCs) are commonly employed in semiconductor manufacturing facilities to control the mass flow rates of various gases required to be supplied to pieces of manufacturing equipment. In the semiconductor manufacturing industry, it is necessary to achieve precise control of the quantity, temperature and pressure of one or more reactant materials which are delivered in the gaseous state to a reaction chamber. Generally, various kinds of gases are used in semiconductor fabricating processes. A mass flow controller controls mass flows of the gases. Mass flow controllers are capable of sensing the flow occurring through the controller and modifying or controlling that flow as necessary to achieve the required control of the mass of the fluid delivered to the particular process.

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