Thin film resistor
Thin film resistors are used in integrated circuits to implement the desired functionality of circuits, including biasing of active devices, serving as voltage dividers, assisting in impedance matching, etc. Film resistors can comprise a variety of materials including tantalum nitride (TaN), silicon chromium (SiCr), and nickel chromium (NiCr). These resistor materials are generally evaporated or sputtered onto a substrate wafer at a metal interconnect level and subsequently patterned and etched. Thin film resistors generally consist of a thin film of resistive material deposited such as by sputter deposition on a layer or substrate of insulative material with end contacts on the resistive material. The end contacts or interconnections are then connected to circuit components in a conventional manner. Thin film resistors are typically formed by deposition of a resistive material on a dielectric layer, and subsequently patterned to a desired size and shape. Deposition of the resistive material can be performed by any deposition means, such as by sputtering. Thin film resistors are very attractive components for high precision analog and mixed signal applications. In addition to a low thermal coefficient of resistance, low voltage coefficient of resistance, and good resistor matching they should provide good stability under stress. The resistors may be part of an individual device, or may be part of a complex hybrid circuit or integrated circuit. Some specific examples of thin film resistors in integrated circuits are the resistive ladder network in an analog-to-digital converter, and current limiting and load resistors in emitter follower amplifiers. Thin film resistors are often used in precision analog-to-digital and digital-to-analog integrated circuits for precision data conversion, which may require precise control of the resistance of the thin film resistor over the operating temperatures. Precise resistance control of the thin film resistor is essential for high precision analog circuits such as analog-to-digital converters and digital-to-analog converters. The efficiency and accuracy of the thin film resistor depends upon the condition of the resistive material and the cleanliness of the portion of the resistor contacting the electrical interconnect.
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