Power semiconductor devices such as switching device and diode are used for power control circuits such as switching mode power supply and inverter circuit. The power semiconductor device is required to have high breakdown voltage, low on-resistance, and small switching loss. A general power semiconductor device which performs power conversion includes an inverter circuit having a parallel connected plurality of half bridge circuits each including serially connected two power semiconductor elements, and a control circuit which drives the power semiconductor elements in the inverter circuit. In general, a power semiconductor device such as an insulating gate type bipolar transistor (IGBT) transforms an input direct current into an alternating current having arbitrary frequency by utilizing a semiconductor and outputs the alternating current. The power semiconductor devices are used for motor control, an inverter according to various kinds of application, or an uninterruptible power supply (UPS). A power semiconductor devices represented by a power MOSFET (metal oxide semiconductor field-effect transistor) and an IGBT (Insulated Gate Bipolar Transistor) is a compact semiconductor chip structured to include a plurality of cells with commonly connected gates formed on a semiconductor substrate, and is capable of quick switching with a low on-resistance. It allows a large current to flow efficiently and responds to a high frequency. In power electronics applications MOSFETs have become the devices of choice for switching high voltages and currents. When compared to bipolar devices, they have fast switching times and simple gate drive circuitry. As a power semiconductor device, an insulated gate bipolar transistor (IGBT) usually employs a large number of spaced cells, which may be rectangular or hexagonal cells, or may be parallel stripes in planar or trench topology. Base current control in such devices is not possible; the devices may have a relatively high forward voltage drop; and the conventional IGBT has a current tail during turn off.
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