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Microwave monolithic integrated circuit (MMIC)

A microwave monolithic integrated circuit (MMIC) is a microwave circuit in which one or more discrete microwave devices are mounted on a substrate. A monolithic microwave integrated circuit (MMIC) device contains all of the active and passive circuit elements and associated interconnections formed either in site on or within a semi-insulating substrate, such as a semiconductor, or insulating substrate by one or more well known deposition processes. The MMIC device is formed on a semiconductor chip (or group of semiconductor chips) and the chip is assembled into a package. External connections and interconnections between the devices are provided on the substrate. The connections are provided both for low-frequency signals and for the microwave signals being processed. Millimeter-wave and/or microwave integrated circuit (MMIC) chips are used in many types of electrical systems that transfer signals at millimeter-wave and microwave frequencies. Many of the MMIC chips are formed from Galium Arsenide (GaAs). These chips are often attached on an alumina, i.e., aluminum oxide, or similar dielectric substrate. MMICs include active devices, such as field effect transistors and bipolar transistors, passive elements such as capacitors, thin film/bulk resistors, and inductors integrated on a single semi-insulating substrate, such as Gallium Arsenide. In an MMIC, passive circuit elements such as resistors, inductors and capacitors are fabricated in monolithic form on a silicon substrate.

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