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Linear motor

Linear motors are used in a variety of applications, including automated positioning systems, robotics, hard drives, semiconductor manufacturing, and electronic assembly. There are various configurations of linear motors, including generally flat motors, U-channel and tubular shaped motors. Different types of linear motors also are available, including brush, AC brushless, stepper, and induction motors. A typical configuration of linear motor includes an armature which makes up the stator. The armature includes a yoke made up of a pack of ferromagnetic laminations. The yoke includes a plurality of teeth arranged at a predefined pitch, with a plurality of slots respectively separating the teeth. The armature further includes coil windings wound around the teeth and housed in the respective slots. The armature travels along the length of the magnet rail with the teeth of the armature adjacent the magnets. The position of the armature is determined via a sensor, and a controller controls the current provided to the coil windings based on the armature position. The linear motor also includes a magnet rail which forms the rotor. The magnet rail includes a plurality of plate-like permanent magnets. The magnets are positioned linearly along the rail at a predefined pitch with corresponding gaps therebetween. Most linear motors that are not required to provide high driving power as in the case of the driving source for a linear motorcar are implemented by combining permanent magnets and electromagnetic coils. A linear motor combining permanent magnets and electromagnetic coils is considered to be applicable to a driving source for a precision micro stage or a precision positioning stage in the field of, for example, semiconductor manufacturing equipment.

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